LS Relay Amp, ZT Relay Amp
| Description | LS Relay AMP | ZT Relay AMP | |||
|---|---|---|---|---|---|
| Single(All Type) | Dual | Single | Dual | ||
| Wavelength | 780~795 nm | 780~795 nm | 780~795 nm | 780~795 nm | 780~795 nm |
| Wafer Size | 200, 300mm | 200, 300mm | 200, 300mm | 200, 300mm | 200, 300mm |
| Equipment/Model | S206D S306C SF120 SF130 SF140 |
SF150 | S205C | SF130 SF140 |
SF120 S204B S206D S306C |
| Parts No. | 4S086-050AN 4S086-051AN 4S086-052AN |
4T046-281AN | 4S086-527-1AN | 4S992-289AN | 4S087-237AN 4S087-238AN |